This book covers various topics regarding the design of compliant mechanisms using topology optimization that have attracted a great deal of attention in recent decades. After comprehensively describing state-of-the-art methods for designing compliant mechanisms, it provides a new topology optimization method for finding new flexure hinges. It then presents several attempts to obtain distributed compliant mechanisms using the topology optimization method. Further, it discusses a Jacobian-based topology optimization method for compliant parallel mechanisms, and introduces readers to the topology optimization of compliant mechanisms, taking into account geometrical nonlinearity and reliability.  Providing a systematic method for topology optimization of flexure hinges, which are essential for designing compliant mechanisms, the book offers a valuable resource for all readers who are interested in designing compliant mechanism-based positioning stages.In addition, the methods for solving the de facto hinges in topology optimized compliant mechanisms will benefit all engineers seeking to design micro-electro-mechanical system (MEMS) structures.